17 Patents
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- US124760822025Radiofrequency Signal Filter Arrangement for Plasma Processing System
Lam Research Corporation
0 cites - US123548402025Systems and Methods for Optimizing Power Delivery to an Electrode of a Plasma Chamber
Lam Research Corporation
0 cites - US123409892025Electrostatic Edge Ring Mounting System for Substrate Processing
Lam Research Corporation
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- US123082112025Systems and Methods for Use of Low Frequency Harmonics in Bias Radiofrequency Supply to Control Uniformity of Plasma Process Results Across Substrate
Lam Research Corporation
0 cites - US122665052025Systems and Methods for Using Binning to Increase Power During a Low Frequency Cycle
Lam Research Corporation
0 cites - US122550522025Process Control for Ion Energy Delivery Using Multiple Generators and Phase Control
Lam Research Corporation
0 cites - US121397912024Showerhead Faceplates with Angled Gas Distribution Passages for Semiconductor Processing Tools
Lam Research Corporation
0 cites - US121318862024Systems and Methods for Extracting Process Control Information from Radiofrequency Supply System of Plasma Processing System
Lam Research Corporation
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- US119086602024Systems and Methods for Optimizing Power Delivery to an Electrode of a Plasma Chamber
Lam Research Corporation
0 cites - 0 cites
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