16 Patents
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- US125291352026Methods of Modifying Openings in Hardmasks and Photoresists to Achieve Desired Critical Dimensions
Applied Materials, Inc.
0 cites - US124179232025Techniques and Apparatus for Selective Shaping of Mask Features Using Angled Beams
Applied Materials, Inc.
0 cites - 0 cites
- US122550672025Method for Depositing Layers Directly Adjacent Uncovered Vias or Contact Holes
Applied Materials, Inc.
0 cites - US121911562025Ribbon Beam Plasma Enhanced Chemical Vapor Deposition System for Anisotropic Deposition of Thin Films
Applied Materials, Inc.
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- US120966222024Directional Etch for Improved Dual Deck Three-dimensional NAND Architecture Margin
Applied Materials, Inc.
0 cites - US119878792024High Aspect Ratio Taper Improvement Using Directional Deposition
Applied Materials, Inc.
0 cites - US119423612024Semiconductor Device Cavity Formation Using Directional Deposition
Applied Materials, Inc.
0 cites - 0 cites
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- US115690952023Techniques and Apparatus for Selective Shaping of Mask Features Using Angled Beams
APPLIED Materials, Inc.
0 cites