Patents/Inventors

John Drewery

San Jose, CAUS9 patents

10 Patents

US125059852025
Systems and Methods for Compensating for RF Power Loss
Lam Research Corporation
0 cites
US124826342025
Symmetric Coupling of Coil to Direct-drive Radiofrequency Power Supplies
Lam Research Corporation
0 cites
US124379662025
Systems and Methods for Reverse Pulsing
Lam Research Corporation
0 cites
US122834632025
Systems and Methods for Multi-level Pulsing in RF Plasma Tools
Lam Research Corporation
0 cites
US121911222025
Electrostatic Chuck with Spatially Tunable RF Coupling to a Wafer
LAM RESEARCH CORPORATION
0 cites
US121658722024
Methods and Systems for Advanced Ion Control for Etching Processes
Lam Research Corporation
0 cites
US120406052024
Voltage Transient Detector and Current Transient Detector
Lam Research Corporation
0 cites
US120026532024
Systems and Methods for Compensating for RF Power Loss
Lam Research Corporation
0 cites
US117987852023
Systems for Reverse Pulsing
Lam Research Corporation
0 cites
US116927322023
Air Cooled Faraday Shield and Methods for Using the Same
Lam Research Corporation
0 cites