Patents/Inventors

John Daugherty

Fremont, CAUS8 patents

8 Patents

US125448092026
Conditioning Chamber Component
Lam Research Corporation
0 cites
US122707482025
Method and Apparatus for Measuring Particles
Lam Research Corporation
0 cites
US122494902025
Single Crystal Metal Oxide Plasma Chamber Component
Lam Research Corporation
0 cites
US121989022025
Laminated Aerosol Deposition Coating for Aluminum Components for Plasma Processing Chambers
Lam Research Corporation
0 cites
US121295692024
Method for Conditioning Semiconductor Processing Chamber Components
Lam Research Corporation
0 cites
US120723182024
Chamber Component Cleanliness Measurement System
Lam Research Corporation
0 cites
US120647952024
Conditioning Chamber Component
Lam Research Corporation
0 cites
US117640862023
Wafer Transport Assembly with Integrated Buffers
LAM RESEARCH CORPORATION
0 cites