5 Patents
- US126092842026Adjustment of Power and Frequency Based on Three or More States
Lam Research Corporation
0 cites - US123810652025Methods and Apparatus for Controlling Plasma in a Plasma Processing System
Lam Research Corporation
0 cites - US123225722025Systems and Methods for Tuning a Mhz RF Generator Within a Cycle of Operation of a Khz RF Generator
Lam Research Corporation
0 cites - US119292352024Systems and Methods for Tuning a Mhz RF Generator Within a Cycle of Operation of a Khz RF Generator
Lam Research Corporation
0 cites - US117987842023Methods and Apparatus for Controlling Plasma in a Plasma Processing System
Lam Research Corporation
0 cites