9 Patents
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- US121005762024Metal Oxide Preclean Chamber with Improved Selectivity and Flow Conductance
APPLIED MATERIALS, Inc.
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- US120149062024High Temperature Detachable Very High Frequency (VHF) Electrostatic Chuck (ESC) for PVD Chamber
APPLIED MATERIALS, Inc.
0 cites - US119159172024Methods and Apparatus for Reducing Sputtering of a Grounded Shield in a Process Chamber
APPLIED MATERIALS, Inc.
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- US118238712023Microwave Plasma Source for Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
Applied Materials, Inc.
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