Patents/Inventors

Johannes Wesslin

EspooFI6 patents

7 Patents

US125903672026
Precursor Supply Chamber
BENEQ OY
0 cites
US121805872024
Vacuum Chamber and Arrangement for Atomic Layer Deposition
BENEQ OY
0 cites
US121805882024
Loading Device, Arrangement and Method for Loading a Reaction Chamber
BENEQ OY
0 cites
US121166682024
Atomic Layer Deposition Reactor Arrangement and a Method for Operating an Atomic Layer Deposition Reactor Arrangement
BENEQ OY
0 cites
US121042482024
Gas Feeding Cup and a Gas Manifold Assembly
BENEQ OY
0 cites
US119268962024
Atomic Layer Deposition Apparatus
BENEQ OY
0 cites
US115497022023
Precursor Supply Cabinet
BENEQ OY
0 cites