Patents/Inventors

Johannes Lippert

Buch am WaldDE2 patents

3 Patents

US124431102025
Optical Assembly, Method for Controlling an Optical Assembly, and Projection Exposure Apparatus
Carl Zeiss SMT GmbH
0 cites
US124114172025
Projection Objective Including an Optical Device
Carl Zeiss SMT GmbH
0 cites
US123139782025
Optical Assembly, Projection Exposure Apparatus and Method
Carl Zeiss SMT GmbH
0 cites