Patents/Inventors

Johannes Franciscus Martinus Van Santvoort

EindhovenNL1 patent

2 Patents

US124114242025
Temperature Conditioning System, a Lithographic Apparatus and a Method of Temperature Conditioning an Object
ASML NETHERLANDS B.V.
0 cites
US116812332023
Gas Mixing for Fast Temperature Control of a Cooling Hood
ASML NETHERLANDS B.V.
0 cites