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Inventors
Johannes Cornelis Jacobus De Langen
Delft
NL
7 patents
3 Patents
US12620547
2026
Beam Manipulator in Charged Particle-beam Exposure Apparatus
ASML Netherlands B.V.
0 cites
US12476075
2025
Stack Alignment Techniques
ASML Netherlands B.V.
0 cites
US11688694
2023
Secure Chips with Serial Numbers
ASML Netherlands B.V.
0 cites