Patents/Inventors

Johannes Bernardus Charles Engelen

'S-HertogenboschNL9 patents

4 Patents

US126191652026
Electrostatic Holder, Object Table and Lithographic Apparatus
ASML Netherlands B.V.
0 cites
US125608722026
Vacuum Sheet Bond Fixturing and Flexible Burl Applications for Substrate Tables
ASML Netherlands B.V.
0 cites
US122355922025
Object Holder, Electrostatic Sheet and Method for Making an Electrostatic Sheet
ASML NETHERLANDS B.V.
0 cites
US121971392025
Object Holder, Tool and Method of Manufacturing an Object Holder
ASML NETHERLANDS B.V.
0 cites