7 Patents
- US124008592025Metal Hard Mask for Precise Tuning of Mandrels
International Business Machines Corporation
0 cites - US122666072025Bottom Barrier Free Interconnects Without Voids
International Business Machines Corporation
0 cites - 0 cites
- US120338922024Structure and Method to Improve FAV RIE Process Margin and Electromigration
TESSERA LLC
0 cites - 0 cites
- US117215782023Split Ash Processes for via Formation to Suppress Damage to Low-k Layers
Tokyo Electron Limited
0 cites - US117106582023Structure and Method to Improve FAV RIE Process Margin and Electromigration
TESSERA LLC
0 cites