Patents/Inventors

Jochen Hetzler

AalenDE6 patents

6 Patents

US125719852026
Measuring Device for Interferometric Shape Measurement
CARL ZEISS SMT GmbH
0 cites
US123320432025
Measurement Method for Interferometrically Determining a Surface Shape
CARL ZEISS SMT GmbH
0 cites
US122350972025
Diffractive Optical Element for a Test Interferometer
CARL ZEISS SMT GmbH
0 cites
US121054272024
Method and Device for Correcting a Telecentricity Error of an Imaging Device
Carl Zeiss SMT GmbH
0 cites
US118797202024
Device and Method for Characterizing the Surface Shape of a Test Object
CARL ZEISS SMT GmbH
0 cites
US117742372023
Method for Calibrating a Measuring Apparatus
CARL ZEISS SMT GmbH
0 cites