3 Patents
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- US125357262026Method and Apparatus for Setting a Side Wall Angle of a Pattern Element of a Photolithographic Mask
Carl Zeiss SMT GmbH
0 cites - US119142892024Method and Apparatus for Determining an Effect of One or More Pixels to Be Introduced Into a Substrate of a Photolithographic Mask
Carl Zeiss SMS Ltd.
0 cites