Patents/Inventors

Joachim Hartjes

AalenDE2 patents

3 Patents

US124363612025
Projection Exposure Apparatus for Semiconductor Lithography
Carl Zeiss SMT GmbH
0 cites
US123395872025
Facet Assembly for a Facet Mirror
Carl Zeiss SMT GmbH
0 cites
US122711172025
Support for an Optical Element
Carl Zeiss SMT GmbH
0 cites