Jiro Higashijima

3 Patents

• US121486322024

  Substrate Processing Apparatus and Cleaning Method of Mist Guard

  TOKYO ELECTRON LIMITED

  0 cites
• US117156502023

  Substrate Processing Apparatus and Manufacturing Method Therefor

  TOKYO ELECTRON LIMITED

  0 cites
• US115748272023

  Substrate Processing Apparatus and Substrate Processing Method

  TOKYO ELECTRON LIMITED

  0 cites