Patents/Inventors

Jinrong Zhao

BeijingCN2 patents

3 Patents

US124127312025
Coil Structure and Plasma Processing Apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., Ltd.
0 cites
US123879062025
Coil Structure for Generating Plasma and Semiconductor Equipment
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., Ltd.
0 cites
US121069342024
Liner, Reaction Chamber and Semiconductor Processing Equipment
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., Ltd.
0 cites