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Inventors
Jinmei Yang
Beijing
CN
1 patent
2 Patents
US12142456
2024
Self-differential Confocal Tilt Sensor for Measuring Level Variation in Charged Particle Beam System
ASML NETHERLANDS B.V.
0 cites
US11581161
2023
Systems and Methods for Etching a Substrate
ASML Netherlands, B.V.
0 cites