Patents/Inventors

Jinchun Hu

BeijingCN4 patents

5 Patents

US123931272025
Exposure Light Beam Phase Measurement Method in Laser Interference Photolithography, and Photolithography System
Beijing U-precision Tech Co., Ltd.
0 cites
US122706452025
High-resolution Phase Detection Method and System Based on Plane Grating Laser Interferometer
TSINGHUA UNIVERSITY
0 cites
US120386902024
Laser Interference Photolithography System
BEIJING U-PRECISION TECH CO., Ltd.
0 cites
US119403492024
Plane Grating Calibration System
BEIJING U-PRECISION TECH CO., Ltd.
0 cites
US117033612023
Five-degree-of-freedom Heterodyne Grating Interferometry System
TSINGHUA UNIVERSITY
0 cites