7 Patents
- 0 cites
- US123266582025Pellicle for Extreme Ultraviolet Lithography Containing Molybdenum Carbide
KOREA ELECTRONICS TECHNOLOGY INSTITUTE
0 cites - US123210922025Pellicle for Extreme Ultraviolet Lithography Containing Amorphous Carbon and Method for Manufacturing the Same
Korea Electronics Technology Institute
0 cites - US122875682025Low-temperature Direct Growth Method of Multilayer Graphene, Pellicle for Extreme Ultraviolet Lithography Using the Same, and Method for Manufacturing the Pellicle
Korea Electronics Technology Institute
0 cites - US122822502025Pellicle for Extreme Ultraviolet Lithography Based on Yttrium
KOREA ELECTRONICS TECHNOLOGY INSTITUTE
0 cites - US119278812024Pellicle for Extreme Ultraviolet Lithography Based on Yttrium Carbide
Korea Electronics Technology Institute
0 cites - US117893592023Method for Manufacturing Pellicle for Extreme Ultraviolet Lithography Having Graphene Defect Healing Layer
KOREA ELECTRONICS TECHNOLOGY INSTITUTE
0 cites