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Inventors
Jin Mo Jae
Cheonan-si
KR
4 patents
5 Patents
US12347720
2025
Apparatus for Treating Substrate
Semes Co., Ltd.
0 cites
US12234555
2025
Substrate Treating Apparatus and Filler Member Provided Therein
SEMES CO., Ltd.
0 cites
US12060942
2024
Sealing Member and Apparatus for Treating Substrate
SEMES CO., Ltd.
0 cites
US11794220
2023
Fluid Supply Unit and Substrate Treating Apparatus Having the Same
Semes Co., Ltd.
0 cites
US11721575
2023
Substrate Support Unit and Substrate Treating Apparatus Having the Same
SEMES CO., Ltd.
0 cites