Patents/Inventors

Jihoon Na

Bucheon-siKR1 patent

2 Patents

US124811442025
EUV Photomask Inspection Apparatus
Samsung Electronics Co., Ltd.
0 cites
US117298962023
Apparatus for Generating Extreme Ultraviolet (EUV), Method of Manufacturing the Same, and EUV System
RESEARCH BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY
0 cites