5 Patents
- US124903682025Junction Temperature Estimation Device and Plasma Generating System Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US124244652025Valve Structure and Substrate Processing Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - 0 cites
- US119488142024Valve Structure and Substrate Processing Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - 0 cites