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Inventors
Jiao Song
Singapore
SG
3 patents
4 Patents
US11846013
2023
Methods and Apparatus for Extended Chamber for Through Silicon via Deposition
APPLIED MATERIALS, Inc.
0 cites
USD1007449
2023
Target Profile for a Physical Vapor Deposition Chamber Target
APPLIED MATERIALS, Inc.
0 cites
US11784033
2023
Methods and Apparatus for Processing a Substrate
APPLIED MATERIALS, Inc.
0 cites
US11581166
2023
Low Profile Deposition Ring for Enhanced Life
APPLIED MATERIALS, Inc.
0 cites