Patents/Inventors

Jianheng Li

Santa Clara, CAUS10 patents

9 Patents

US125059992025
Precursors and Flowable CVD Methods for Making Low-k Films to Fill Surface Features
Versum Materials US, LLC
0 cites
US124547532025
Compositions and Methods Using Same for Deposition of Silicon-containing Film
Versum Materials US, LLC
0 cites
US124287222025
Compositions and Methods Using Same for Deposition of Silicon-containing Film
Versum Materials US, LLC
0 cites
US123984632025
Organic Small Molecule Inhibitors and Application Method Thereof in Thin Film Deposition
HEFEI ADCHEM SEMI-TECH. CO., Ltd.
0 cites
US123126842025
Siloxane Compositions and Methods for Using the Compositions to Deposit Silicon Containing Films
Versum Materials US, LLC
0 cites
US120211522024
Process to Reduce Plasma Induced Damage
Applied Materials, Inc.
0 cites
US119131122024
Processes for Depositing Silicon-containing Films Using Halidosilane Compounds and Compositions
Versum Materials US, LLC
0 cites
US117323512023
Methods for Depositing a Conformal Metal or Metalloid Silicon Nitride Film and Resultant Films
Versum Materials US, LLC
0 cites
US116707222023
Process to Reduce Plasma Induced Damage
Applied Materials, Inc.
0 cites