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Inventors
Ji-hwan Lee
Incheon
KR
3 patents
4 Patents
US12341030
2025
Support Unit and Substrate Treating Apparatus
SEMES CO., Ltd.
0 cites
US12327735
2025
Apparatus and Method for Processing Substrate
SEMES CO., Ltd.
0 cites
US12142492
2024
Method for Treating Substrate and Apparatus for Treating Substrate
SEMES CO., Ltd.
0 cites
US12004268
2024
Transferring Unit, Substrate Treating Apparatus Including the Same, and Substrate Treating Method
SEMES CO., Ltd.
0 cites