16 Patents
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- US123225872025Substrate Drying Apparatus and Semiconductor Device Manufacturing Method Using Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US122265232025Method for Preparing Self-assembled Nanoparticle Releasing Soluble Microneedle Structure
RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY
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- US121486742024Substrate Processing Control Using a Measured Size Distribution of By-product Particles
SEMES CO., Ltd.
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- US119232132024Substrate Heating Unit, Substrate Processing Apparatus, and Substrate Processing Method
SEMES CO., Ltd.
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