Patents/Inventors

Jewoo Han

Hwaseong-siKR2 patents

3 Patents

US122116722025
Apparatus and Method for Plasma Etching
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US119843042024
Apparatus and Method for Plasma Etching
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US119292392024
Plasma Processing Apparatus and Semiconductor Device Manufacturing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites