Patents/Inventors

Jerome S. Hubacek

Fremont, CAUS1 patent

2 Patents

US122781252025
Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
0 cites
US121836042024
Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
0 cites