6 Patents
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- US122875702025Pressure Control Valve, a Fluid Handling Structure for Lithographic Apparatus and a Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites - US122179302025Systems and Methods for Thermally Conditioning a Wafer in a Charged Particle Beam Apparatus
ASML Netherlands B.V.
0 cites - 0 cites
- US118043582023System and Methods for Thermally Conditioning a Wafer in a Charged Particle Beam Apparatus
ASML Netherlands B.V.
0 cites - US117640272023Systems and Methods of Cooling Objective Lens of a Charged-particle Beam System
ASML Netherlands B.V.
0 cites