Patents/Inventors

Jeongil Mun

Hwaseong-siKR1 patent

2 Patents

US118624402024
Semiconductor Processing Equipment Including Electrostatic Chuck for Plasma Processing
Samsung Electronics Co., Ltd.
0 cites
US117156282023
Method of Forming Plasma Processing Apparatus, Related Apparatus, and Method of Forming Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites