25 Patents
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- US124475792025Chemical Mechanical Polishing Vibration Measurement Using Optical Sensor
Applied Materials, Inc.
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- US120366352024Methods of Detecting Non-conforming Substrate Processing Events During Chemical Mechanical Polishing
Applied Materials, Inc.
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- US119118692024Chemical Mechanical Polishing System with Platen Temperature Control
Applied Materials, Inc.
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- US118507002023Sequential Application of Cleaning Fluids for Improved Maintenance of Chemical Mechanical Polishing Systems
Applied Materials, Inc.
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- US117689842023Parameter Sensing and Computer Modeling for Gas Delivery Health Monitoring
Applied Materials, Inc.
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- US116211522023Methods and Apparatus for Processing a Substrate Using Improved Shield Configurations
APPLIED MATERIALS, Inc.
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