15 Patents
- US126191562026EUV Light Uniformity Control Apparatus, EUV Exposure Equipment Including the Same, and Method of Controlling EUV Light Uniformity by Using the Control Apparatus
Samsung Electronics Co., Ltd.
0 cites - US125487542026Method for Manufacturing Electrode for All-solid-state Battery, and Electrode Manufactured Thereby
LG ENERGY SOLUTION, Ltd.
0 cites - US125061352025Free Standing Film for Dry Electrode, Manufacturing Method Thereof, Dry Electrode Comprising the Same, and Secondary Battery
LG Energy Solution, Ltd.
0 cites - 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- US118529842023Target Debris Collection Device and Extreme Ultraviolet Light Source Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US118222602023Apparatus for Removing Residue of EUV Light Source Vessel
Samsung Electronics Co., Ltd.
0 cites - US117200272023Apparatus for Generating Extreme Ultraviolet Light and Lithography Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US117118832023Droplet Accelerating Assembly and Extreme Ultra-violet Lithography Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US116985902023Collector Mirror and Apparatus for Creating Extreme Ultraviolet Light Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - 0 cites
- US115990312023Target Debris Collection Device and Extreme Ultraviolet Light Source Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites