Patents/Inventors

Jens Oster

Ober-RamstadtDE1 patent

2 Patents

US124932382025
Method, Device and Computer Program for Repairing a Mask Defect
Carl Zeiss SMT GmbH
0 cites
US118861262024
Apparatus and Method for Removing a Single Particulate from a Substrate
Carl Zeiss SMT GmbH
0 cites