Patents/Inventors

Jens Kugler

AalenDE3 patents

3 Patents

US125470852026
System and Projection Exposure Apparatus
Carl Zeiss SMT GmbH
0 cites
US123325762025
Method for Maintaining a Projection Exposure Apparatus, Service Module and Arrangement for Semiconductor Lithography
Carl Zeiss SMT GmbH
0 cites
US122875872025
Damping Arrangement for Vibration Damping of an Element in an Optical System
Carl Zeiss SMT GmbH
0 cites