Patents/Inventors

Jennifer Y. Sun

Fremont, CAUS31 patents

33 Patents

US126092862026
Protection Treatments for Surfaces of Semiconductor Fabrication Equipment
Applied Materials, Inc.
0 cites
US125923642026
Fluoride Coating to Improve Chamber Performance
Applied Materials, Inc.
0 cites
US125487422026
Corrosion Resistant Ground Shield of Processing Chamber
Applied Materials, Inc.
0 cites
US124976922025
Halogen Resistant Coatings and Methods of Making and Using Thereof
Applied Materials, Inc.
0 cites
US124924642025
Protective Metal Oxy-fluoride Coatings
Applied Materials, Inc.
0 cites
US124420722025
Atomic Layer Deposition Coatings for High Temperature Ceramic Components
Applied Materials, Inc.
0 cites
US123519102025
Hafnium Aluminum Oxide Coatings Deposited by Atomic Layer Deposition
Applied Materials, Inc.
0 cites
US122093072025
Zone-controlled Rare-earth Oxide ALD and CVD Coatings
Applied Materials, Inc.
0 cites
US121958392025
Ion Beam Sputtering with Ion Assisted Deposition for Coatings on Chamber Components
Applied Materials, Inc.
0 cites
US121621152024
Chamber Components with Polished Internal Apertures
Applied Materials, Inc.
0 cites
US121042462024
Atomic Layer Deposition of Protective Coatings for Semiconductor Process Chamber Components
Applied Materials, Inc.
0 cites
US120981072024
Methods of Making Nanopowders, Nanoceramic Materials and Nanoceramic Components
Applied Materials, Inc.
0 cites
US120496962024
Plasma Resistant Process Chamber Lid
Applied Materials, Inc.
0 cites
US120026572024
Multi-layer Plasma Resistant Coating by Atomic Layer Deposition
Applied Materials, Inc.
0 cites
US119843022024
Magnetic-material Shield Around Plasma Chambers Near Pedestal
Applied Materials, Inc.
0 cites
US118374482023
High-temperature Chamber and Chamber Component Cleaning and Maintenance Method and Apparatus
Applied Materials, Inc.
0 cites
US117734792023
Plasma Erosion Resistant Thin Film Coating for High Temperature Application
Applied Materials, Inc.
0 cites
US117319072023
Ceramic Material with High Thermal Shock Resistance and High Erosion Resistance
Applied Materials, Inc.
0 cites
US117243532023
Chamber Components with Polished Internal Apertures
Applied Materials, Inc.
0 cites
US117027442023
Metal Oxyfluoride Film Formation Methods
Applied Materials, Inc.
0 cites
US116803082023
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings
Applied Materials, Inc.
0 cites
US116675752023
Erosion Resistant Metal Oxide Coatings
Applied Materials, Inc.
0 cites
US116675772023
Y 2 O 3 —zro 2 Erosion Resistant Material for Chamber Components in Plasma Environments
Applied Materials, Inc.
0 cites
US116675782023
Methods of Making Nanopowders, Nanoceramic Materials and Nanoceramic Components
Applied Materials, Inc.
0 cites
US116580142023
Apparatuses and Methods of Protecting Nickel and Nickel Containing Components with Thin Films
APPLIED MATERIALS, Inc.
0 cites
US116395472023
Halogen Resistant Coatings and Methods of Making and Using Thereof
Applied Materials, Inc.
0 cites
US115877712023
Chemistry Compatible Coating Material for Advanced Device On-wafer Particle Performance
Applied Materials, Inc.
0 cites
US115783982023
Plasma Spray Coating Design Using Phase and Stress Control
Applied Materials, Inc.
0 cites
US115726172023
Protective Metal Oxy-fluoride Coatings
Applied Materials, Inc.
0 cites
US115663172023
Ion Beam Sputtering with Ion Assisted Deposition for Coatings on Chamber Components
Applied Materials, Inc.
0 cites
US115663182023
Ion Beam Sputtering with Ion Assisted Deposition for Coatings on Chamber Components
Applied Materials, Inc.
0 cites
US115663192023
Ion Beam Sputtering with Ion Assisted Deposition for Coatings on Chamber Components
Applied Materials, Inc.
0 cites
US115628902023
Corrosion Resistant Ground Shield of Processing Chamber
Applied Materials, Inc.
0 cites