6 Patents
- US125989302026Conformal Thermal CVD with Controlled Film Properties and High Deposition Rate
Lam Research Corporation
0 cites - US124216022025Multi-station Semiconductor Processing with Independently Adjustable Pedestals
Lam Research Corporation
0 cites - 0 cites
- US119591722024Substrate Processing Systems Including Gas Delivery System with Reduced Dead Legs
LAM RESEARCH CORPORATION
0 cites - 0 cites
- US116616542023Substrate Processing Systems Including Gas Delivery System with Reduced Dead Legs
LAM RESEARCH CORPORATION
0 cites