Patents/Inventors

Jengyi Yu

San Ramon, CAUS20 patents

21 Patents

US125867652026
Surface Modification for Metal-containing Photoresist Deposition
Lam Research Corporation
0 cites
US125108252025
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US125108262025
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US124746382025
Underlayer for Photoresist Adhesion and Dose Reduction
Lam Research Corporation
0 cites
US124379952025
Tin Oxide Films in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites
US124179022025
Method for Cleaning a Chamber
Lam Research Corporation
0 cites
US124179162025
Tin Oxide Films in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites
US123157272025
Eliminating Yield Impact of Stochastics in Lithography
Lam Research Corporation
0 cites
US122939192025
Alternating Etch and Passivation Process
Lam Research Corporation
0 cites
US122781252025
Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
0 cites
US121911252025
Removing Metal Contamination from Surfaces of a Processing Chamber
Lam Research Corporation
0 cites
US121835892024
Tin Oxide Mandrels in Patterning
Lam Research Corporation
0 cites
US121836042024
Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
0 cites
US121054222024
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US120947112024
Tin Oxide Films in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites
US120625382024
Atomic Layer Etch and Selective Deposition Process for Extreme Ultraviolet Lithography Resist Improvement
Lam Research Corporation
0 cites
US120273752024
Selective Etch Using a Sacrificial Mask
Lam Research Corporation
0 cites
US119889652024
Underlayer for Photoresist Adhesion and Dose Reduction
Lam Research Corporation
0 cites
US118482122023
Alternating Etch and Passivation Process
Lam Research Corporation
0 cites
US118428882023
Removing Metal Contamination from Surfaces of a Processing Chamber
Lam Research Corporation
0 cites
US115519382023
Alternating Etch and Passivation Process
Lam Research Corporation
0 cites