Patents/Inventors

Jeng-horng Chen

HsinchuTW2 patents

3 Patents

US119214342024
Mask Cleaning
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119142862024
Pellicle Assembly and Method for Advanced Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd
0 cites
US117405632023
Mask Cleaning
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites