Patents/Inventors

Jen-yang Chung

HsinchuTW5 patents

6 Patents

US122986642025
Advanced Load Port for Photolithography Mask Inspection Tool
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US121675252024
EUV Light Source and Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120449752024
Extreme Ultraviolet Control System
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119214312024
Advanced Load Port for Photolithography Mask Inspection Tool
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US118323722023
EUV Light Source and Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US115927542023
Advanced Load Port for Photolithography Mask Inspection Tool
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites