6 Patents
- US125979062026Doped Crystalline Piezoelectric Resonator Films and Methods of Forming Doped Single Crystalline Piezoelectric Resonator Layers on Substrates via Epitaxy
Akoustis Technologies Corp.
0 cites - US125491502026Methods of Forming Epitaxial Alscn Resonators with Superlattice Structures Including Algan Interlayers and Varied Scandium Concentrations for Stress Control and Related Structures
Akoustis Technologies Corp.
0 cites - US118568582023Methods of Forming Doped Crystalline Piezoelectric Thin Films via MOCVD and Related Doped Crystalline Piezoelectric Thin Films
Akoustis, Inc.
0 cites - US118325212023Methods of Forming Group Iii-nitride Single Crystal Piezoelectric Thin Films Using Ordered Deposition and Stress Neutral Template Layers
Akoustis, Inc.
0 cites