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Inventors
Je Ho Chae
Pyeongtaek
KR
4 patents
3 Patents
US12550689
2026
Aluminum Nitride Sintered Body and Member for Semiconductor Manufacturing Apparatus Comprising Same
Mico Ceramics Ltd.
0 cites
US12538388
2026
Ceramic Heater and Manufacturing Method Thereof
MICO CERAMICS Ltd.
0 cites
US12351525
2025
Method for Manufacturing Ceramic Heater
MICO CERAMICS Ltd.
0 cites