Patents/Inventors

Jan Steven Christiaan Westerlaken

HeeschNL3 patents

4 Patents

US122355852025
Radiation Conduit
ASML Netherlands B.V.
0 cites
US119829472024
Contamination Trap
ASML NETHERLAND B.V.
0 cites
US118468872023
Prolonging Optical Element Lifetime in an EUV Lithography System
ASML Netherlands B.V.
0 cites
US115560672023
Contamination Trap
ASML Netherlands B.V.
0 cites