5 Patents
- US125395772026System and Method for Detecting a Membrane Failure in a Chemical Mechanical Polishing System
Applied Materials, Inc.
0 cites - 0 cites
- US120366352024Methods of Detecting Non-conforming Substrate Processing Events During Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites - US119118692024Chemical Mechanical Polishing System with Platen Temperature Control
Applied Materials, Inc.
0 cites - US118507002023Sequential Application of Cleaning Fluids for Improved Maintenance of Chemical Mechanical Polishing Systems
Applied Materials, Inc.
0 cites