Patents/Inventors

James F. Lee

Casper, WYUS1 patent

2 Patents

US123385312025
Spatially Tunable Deposition to Compensate Within Wafer Differential Bow
Lam Research Corporation
0 cites
US119461422024
Spatially Tunable Deposition to Compensate Within Wafer Differential Bow
Lam Research Corporation
0 cites