9 Patents
- US126076892026Method for Extracting Characteristics of Broadband Passive Element and Apparatus for Extracting Characteristics of Broadband Passive Element
Huwin Co., Ltd.
0 cites - US125623532026Replaceable Electrostatic Chuck Outer Ring for Edge Arcing Mitigation
Applied Materials, Inc.
0 cites - US123004732025Electrostatic Chuck for High Bias Radio Frequency (RF) Power Application in a Plasma Processing Chamber
APPLIED MATERIALS, Inc.
0 cites - US122725752025Advanced Temperature Control for Wafer Carrier in Plasma Processing Chamber
Applied Materials, Inc.
0 cites - 0 cites
- US119488262024High Power Electrostatic Chuck Design with Radio Frequency Coupling
Applied Materials, Inc.
0 cites - 0 cites
- US118374792023Advanced Temperature Control for Wafer Carrier in Plasma Processing Chamber
Applied Materials, Inc.
0 cites - US115519162023Sheath and Temperature Control of a Process Kit in a Substrate Processing Chamber
APPLIED MATERIALS, Inc.
0 cites