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Inventors
Jaechul Jung
Sejong
KR
3 patents
3 Patents
US12592361
2026
Hybrid High-power and Broadband Variable Impedance Modules
MKS Inc.
0 cites
US12087549
2024
Demagnetizing Coils for Linearity Improvement of Current Ratio of Plasma Processing Systems
MKS Instruments, Inc.
0 cites
US11823869
2023
Impedance Matching in a RF Power Generation System
MKS Instruments, Inc.
0 cites