Jae Eon Park

3 Patents

• US122643922025

  Silicon Precursor Compounds and Method for Forming Silicon-containing Films

  ENTEGRIS, Inc.

  0 cites
• US120716882024

  Precursors and Methods for Preparing Silicon-containing Films

  ENTEGRIS, Inc.

  0 cites
• US120376812024

  Method for Forming Carbon Rich Silicon-containing Films

  ENTEGRIS, Inc.

  0 cites