4 Patents
- US125867572026Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
Lam Research Corporation
0 cites - US124890062025Auto-calibration to a Station of a Process Module That Spins a Wafer
Lam Research Corporation
0 cites - US117422292023Auto-calibration to a Station of a Process Module That Spins a Wafer
Lam Research Corporation
0 cites - US115943972023Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
Lam Research Corporation
0 cites