Jaakko Anttila

3 Patents

• US122373922025

  Titanium Aluminum and Tantalum Aluminum Thin Films

  ASM IP Holding B.V.

  0 cites
• US121295452024

  Precursor Capsule, a Vessel and a Method

  ASM IP Holding B.V.

  0 cites
• US116461942023

  Methods for Forming Silicon Nitride Thin Films

  ASM IP Holding B.V.

  0 cites